The effect of substrate and processing conditions on the properties of sol-gel derived Pb(Zr,Ti)O-3 thin films
Küçük Resim Yok
Tarih
2012
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
INDERSCIENCE ENTERPRISES LTD
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
Lead zirconate titanate Pb(Zr0.45Ti0.55)O-3 PZT thin films were prepared by sol-gel method on Pt-(111)/Ti/SiO2/Si-(100) substrates from metal organic precursor solutions. Two different types of substrates were used in this study. It was concluded that the substrates were very effective on the structural and electrical properties of the films. The difference observed in the electrical properties of the films prepared on different substrates was explained by the difference in the crystallinity, (111) dominant orientation and grain size of the substrates. The films prepared at various temperatures from 650 degrees C down to 450 degrees C have all displayed full (111) orientation. The remnant polarisation of the PZT film fabricated at 650 degrees C was 42 mu C/cm(2) whereas remnant polarisation of the film annealed at 450 degrees C was > 15 mu C/cm(2) which was still high enough for practical applications.
Açıklama
Anahtar Kelimeler
PZT, thin film, electrical properties, ferroelectrics
Kaynak
INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING
WoS Q Değeri
Q4
Scopus Q Değeri
Q3
Cilt
6
Sayı
01.Feb
