The effect of substrate and processing conditions on the properties of sol-gel derived Pb(Zr,Ti)O-3 thin films

dc.authorid0000-0002-4234-0228en_US
dc.contributor.authorAlkoy, Ebru Mensur
dc.contributor.authorAlkoy, Sedat
dc.contributor.authorShiosaki, Tadashi
dc.date.accessioned2024-07-12T21:49:54Z
dc.date.available2024-07-12T21:49:54Z
dc.date.issued2012en_US
dc.departmentMaltepe Üniversitesien_US
dc.description.abstractLead zirconate titanate Pb(Zr0.45Ti0.55)O-3 PZT thin films were prepared by sol-gel method on Pt-(111)/Ti/SiO2/Si-(100) substrates from metal organic precursor solutions. Two different types of substrates were used in this study. It was concluded that the substrates were very effective on the structural and electrical properties of the films. The difference observed in the electrical properties of the films prepared on different substrates was explained by the difference in the crystallinity, (111) dominant orientation and grain size of the substrates. The films prepared at various temperatures from 650 degrees C down to 450 degrees C have all displayed full (111) orientation. The remnant polarisation of the PZT film fabricated at 650 degrees C was 42 mu C/cm(2) whereas remnant polarisation of the film annealed at 450 degrees C was > 15 mu C/cm(2) which was still high enough for practical applications.en_US
dc.identifier.doi10.1504/IJSURFSE.2012.046839
dc.identifier.endpage34en_US
dc.identifier.issn1749-785X
dc.identifier.issn1749-7868
dc.identifier.issue01.Feben_US
dc.identifier.scopus2-s2.0-84861177210en_US
dc.identifier.scopusqualityQ3en_US
dc.identifier.startpage24en_US
dc.identifier.urihttps://dx.doi.org/10.1504/IJSURFSE.2012.046839
dc.identifier.urihttps://hdl.handle.net/20.500.12415/8107
dc.identifier.volume6en_US
dc.identifier.wosWOS:000304193000004en_US
dc.identifier.wosqualityQ4en_US
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoenen_US
dc.publisherINDERSCIENCE ENTERPRISES LTDen_US
dc.relation.ispartofINTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERINGen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.snmzKY01308
dc.subjectPZTen_US
dc.subjectthin filmen_US
dc.subjectelectrical propertiesen_US
dc.subjectferroelectricsen_US
dc.titleThe effect of substrate and processing conditions on the properties of sol-gel derived Pb(Zr,Ti)O-3 thin filmsen_US
dc.typeArticle
dspace.entity.typePublication

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